Silicon Optoelectronic Integrated Circuits

Preface to the Second Edition

Preface to the First Edition

Contents

About the Author

Symbols

1 Basics and Theory

1.1 Basics of Optical Absorption

1.1.1 Photons and Their Properties

1.1.2 Optical Absorption of Important Semiconductor Materials

1.1.3 Photogeneration

1.2 Semiconductor Equations

1.3 Important Models for Photodetectors

1.3.1 Carrier Drift

1.3.2 Carrier Diffusion

1.3.3 Quantum Efficiency and Responsivity

1.3.4 Equivalent Circuit of a Photodiode

References

2 Integrated Silicon Photodetectors

2.1 Integrated Detectors in Bipolar Technology

2.1.1 Bipolar Processes

2.1.2 Integrated Detectors in Standard Bipolar Technology

2.1.3 Integrated Detectors in Modified Bipolar Technology

2.2 CMOS-Integrated Photodetectors

2.2.1 One-Well CMOS Processes

2.2.2 Twin-Well CMOS Processes

2.2.3 Triple-Well CMOS Processes

2.2.4 Integrated Detectors in Standard CMOS Processes

2.2.5 Spatially-Modulated-Light Detector

2.2.6 PIN Photodiode

2.2.7 Charge-Coupled-Device Image Sensors

2.2.8 Active-Pixel Sensors

2.2.9 Amorphous-Silicon Detectors

2.2.10 CMOS-Integrated Bipolar Phototransistors

2.2.11 Photonic Mixer Device

2.2.12 Avalanche Photodiodes

2.2.13 Single-Photon Avalanche Diodes

2.3 BiCMOS-Integrated Detectors

2.3.1 BiCMOS Processes

2.3.2 BiCMOS-Integrated Photodiodes

References

3 Detectors in Thin Crystalline Silicon Films

3.1 Photodiodes in Silicon-on-Insulator

3.2 Silicon on Sapphire

3.3 Polyimide Bonding

References

4 SiGe Photodetectors

4.1 Heteroepitaxial Growth

4.2 Absorption Coefficient of SiGe Alloys

4.3 SiGe/Si PIN Hetero-Bipolar-Transistor Integration

References

5 Design of Integrated Optical Receiver Circuits

5.1 Circuit Simulators and Transistor Models

5.2 Layout and Verification Tools

5.3 Design of OEICs

5.4 Transimpedance Amplifier

5.4.1 Frequency Response

5.4.2 Phase and Group Delay

5.4.3 Stability and Compensation

5.4.4 Bandwidth of Transistor Transimpedance Amplifier Circuit

5.4.5 Bandwidth Limit of Integrated Transimpedance Amplifiers

5.4.6 New ?-Model for Integrated Transimpedance Amplifier

5.4.7 Shunt-Shunt Feedback

5.4.8 Input and Output Resistance

5.4.9 Noise and Sensitivity

5.4.10 Poisson Statistics and Quantum Limit

References

6 Examples of Optoelectronic Integrated Circuits

6.1 Digital CMOS Circuits

6.1.1 Synchronous Circuits

6.1.2 Asynchronous Circuits

6.2 Digital BiCMOS Circuits

6.3 Laser Driver Circuits

6.4 Analog Circuits

6.4.1 Bipolar Circuits

6.4.2 Two-Dimensional CMOS Imagers

6.4.3 Optical Distance Measurement Circuits

6.4.4 3D Sensors with Photodiodes in Standard CMOS

6.4.5 3D Sensors with PIN Photodiodes

6.4.6 3D Sensors with SPADs

6.4.7 Smart Pixel Sensors

6.4.8 CMOS Optical Sensors

6.4.9 BiCMOS Optical Sensors

6.4.10 Sensors Using Single-Photon Detection

6.4.11 CMOS Circuits for Optical Storage Systems

6.4.12 BiCMOS Circuits for Optical Storage Systems

6.4.13 Continuous-Mode Fiber Receivers

6.4.14 Receiver for Wireless Infrared Communication

6.4.15 OWC Receivers and Experiments with Visible Light

6.4.16 Hybrid Receivers

6.4.17 Speed Enhancement Techniques

6.4.18 Plastic-Optical-Fiber Receivers

6.4.19 Burst-Mode Optical Receivers

6.4.20 Deep-Sub-m Receivers

6.4.21 Receivers Aiming Towards the Quantum Limit

6.4.22 Comparison of Fiber Receivers

6.4.23 Special Circuits

6.5 Summary

References

7 Circuits for Electronic-Photonic Integration

7.1 3D-Integration Technologies

7.1.1 Copper Pillar Connection

7.1.2 Through Oxide Vias

7.1.3 Through Silicon Vias

7.2 Optical Switch

7.3 Optical Transceiver

7.4 Sensor for Optical Tomography

7.5 Sensor for 3D Microimaging

References

Index