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Self-Powered and Soft Polymer MEMS/NEMS Devices

Self-Powered and Soft Polymer MEMS/NEMS Devices

Ajay Giri Prakash Kottapalli, Kai Tao, Debarun Sengupta, Michael S. Triantafyllou

 

Verlag Springer-Verlag, 2019

ISBN 9783030055547 , 94 Seiten

Format PDF, OL

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53,49 EUR

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Self-Powered and Soft Polymer MEMS/NEMS Devices


 

Preface

6

Contents

9

Chapter 1: MEMS/NEMS-Enabled Energy Harvesters as Self-Powered Sensors

11

1.1 Introduction

11

1.2 Methods of Mechanical Energy Harvesting

14

1.2.1 Electrostatic MEMS Harvesters

16

Electret-Free Electrostatic Harvesters

16

Electret-Based Electrostatic Energy Harvesters

19

Electroactive Polymer-Based Harvesters

23

1.2.2 Electromagnetic MEMS Harvesters

24

Electromagnetic Generators by Relative Movement

24

Electromagnetic Generators with Magnetostrictive Materials

29

1.2.3 Piezoelectric MEMS Harvesters

29

1.2.4 Triboelectric Nanogenerators

30

1.3 MEMS/NEMS-Enabled Harvesters as Self-Powered Sensors

32

1.3.1 Ceramic-Based Piezoelectric Self-Powered Sensors

32

1.3.2 Self-Powered Sensors Using ZnO Nanowires

33

1.3.3 Polymer-Based Piezoelectric Nanosensors

34

1.4 Triboelectric Nanogenerators as Self-Powered Sensors

34

1.4.1 Triboelectric Nanogenerators as Trajectory Sensors

34

1.4.2 Triboelectric Nanogenerators as Tactile Sensors

35

1.4.3 Triboelectric Nanogenerators as Acoustic Sensors

36

1.4.4 Triboelectric Nanogenerators as Chemical Sensors

36

1.5 Conclusions

37

References

38

Chapter 2: Flexible and Wearable Piezoelectric Nanogenerators

41

2.1 Introduction

42

2.1.1 Mechanism of Piezoelectric Effect

42

2.1.2 Piezoelectric Materials

43

2.2 Piezoelectric Polymers

44

2.2.1 Bulk Piezopolymers

45

2.2.2 Polymer Piezoelectric Composites

47

2.2.3 Voided Charged Polymers

47

2.3 Piezoelectric Energy Harvesters

48

2.3.1 Piezoelectric Thin Film/Bulk Energy Harvesters

49

2.3.2 Piezoelectric Nanofiber Energy Harvesters

55

2.3.3 Piezoelectric Nanowire Energy Harvesters

61

2.4 Conclusions and Future Work

66

References

66

Chapter 3: Nature-Inspired Self-Powered Sensors and Energy Harvesters

71

3.1 Introduction

71

3.1.1 Flow Sensing in Marine Creatures

72

3.1.2 Flow Sensing in Fishes

72

3.1.3 Flow Sensing in Crocodiles

75

3.1.4 Flow Sensing in Harbor Seals

77

3.2 Underwater Animal-Inspired Self-Powered Sensors

78

3.2.1 Neuromast-Inspired Biomimetic MEMS Sensors

78

3.2.2 Crocodile-Inspired Self-Powered Sensors

82

3.2.3 Harbor Seal-Inspired Biomimetic Sensors

84

3.3 Conclusions and Future Work

88

References

89

Index

92