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A Practical Guide to Surface Metrology
Michael Quinten
Verlag Springer-Verlag, 2020
ISBN 9783030294540 , 247 Seiten
Format PDF, OL
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Geräte
Preface
7
Contents
9
About the Author
12
List of Figures
13
List of Tables
22
Chapter 1: Introduction to Surfaces and Surface Metrology
23
1.1 Microscopic View on a Surface
25
1.2 Macroscopic View on a Surface
27
1.3 Measurement and Validation
30
1.3.1 Profile Measurement
38
1.3.2 Areal Measurement
49
1.3.3 Measurement Modules
53
1.3.3.1 Stages
54
1.3.3.2 Piezoelectrical and Inductive Transducers
56
1.3.3.3 Optical Detectors
56
1.3.3.4 Light Sources
60
1.3.4 The Way to Reliable Surface Data
61
References
63
Chapter 2: Tactile Surface Metrology
64
2.1 Tactile Surface Profiling
64
2.2 Atomic Force Microscopy
68
References
75
Chapter 3: Capacitive and Inductive Surface Metrology
77
3.1 Capacitive Surface Profiling
77
3.2 Surface Profiling with Eddy Currents
82
References
85
Chapter 4: Optical Surface Metrology - Physical Basics
86
4.1 Electromagnetic Waves
86
4.2 Huygens-Fresnel Principle of Wave Propagation
89
4.3 Polarization
90
4.4 Interference
91
4.5 Coherence
93
4.6 Dielectric Function and Refractive Index
94
4.7 Reflection and Refraction
100
4.8 Dispersion Effects
103
4.9 Diffraction
105
4.10 Scattering
107
References
111
Chapter 5: Optical Surface Metrology: Methods
113
5.1 Chromatic Confocal Surface Profiling
113
5.2 Surface Profiling with an Autofocus Sensor
120
5.3 Light Sectional Methods
122
5.3.1 Laser Point Triangulator
122
5.3.2 Line Projection
123
5.3.3 Fringe Projection
124
5.4 Microscopy Methods
126
5.4.1 Classical Microscopy
127
5.4.2 Confocal Microscopy
133
5.4.3 Focal Depth Variation
142
5.4.4 Scanning Near-Field Optical Microscopy
145
5.5 Interferometric Methods
146
5.5.1 Interferometric Form Inspection
150
5.5.1.1 Form Inspection of Planar Surfaces
150
5.5.1.2 Form Inspection of Spherical, Aspherical and Freeform Surfaces
151
5.5.2 Tilted Wave Interferometry
152
5.5.3 White Light Interferometry
154
5.5.4 Wavelength Scanning Interferometry
163
5.5.5 Multi-Wavelength Interferometry
165
5.5.6 Grazing Incidence Interferometry
168
5.5.7 Frequency Scanning Interferometry
171
5.5.8 Digital Holographic Microscopy
173
5.5.9 Conoscopy
177
5.6 Wave Front Sensing (Shack-Hartmann)
178
5.7 Deflectometry
181
5.8 Makyoh Topography Sensor
183
5.9 Surface Profiling Using Elastic Light Scattering
185
5.9.1 Total Integrated Scattering (TIS)
186
5.9.2 Angular Resolved Scattering (ARS)
187
5.9.3 Speckle Based Roughness Determination
191
5.10 Spectral Analysis and Characterization
194
5.10.1 Reflectometry
195
5.10.1.1 Optical Film Thickness Determination
197
5.10.1.2 Critical Dimensions Determination
204
5.10.2 Spectroscopic Ellipsometry
206
References
208
Chapter 6: Imaging Methods
217
6.1 Industrial Image Processing
217
6.1.1 Illumination
219
6.1.2 Camera
219
6.1.3 Image Processing Hardware
220
6.1.4 Digital Image Processing Software
220
6.1.5 Mechanics
221
6.2 Shape from Shading
221
6.3 Hyperspectral Imaging
223
6.4 Scanning Electron Microscopy
226
6.5 Optical Coherence Tomography
229
6.6 Terahertz Spectroscopy
231
References
234
Chapter 7: Multisensor - Systems - A Versatile Approach to Surface Metrology
236
Appendix - Numerics with Complex Numbers
240
Addition
240
Multiplication
241
Modulus
241
Division
242
Power n
242
Logarithm
243
Exponentiation
243
Trigonometric Functions
243
Index
244
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